Hideki Tanabe

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 9:00 AM - 10:15 AM N401 (Oral)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[11a-N401-1~5] 7.3 Micro/Nano patterning and fabrication

10:00 AM - 10:15 AM

[11a-N401-5] Fabrication of self-standing thin resin film with small through holes
by low temperature nanoimprint process

〇Hideki Tanabe¹, Hiroaki Kawata¹, Masaaki Yasuda¹, Yoshihiko Hirai¹ (1.Osaka Pref. Univ.)