Jun Yamaguchi

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 9:00 AM - 11:40 AM S301 (Oral)

Symposium (Oral)
| Symposium
| Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

[11a-S301-1~7] Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

10:10 AM - 10:25 AM

[11a-S301-4] Examination of Co-ALD for next-generation high-reliable interconnects

〇Jun Yamaguchi¹, Momoko Deura¹, Takeshi Momose¹, Yukihiro Shimogaki¹ (1.The Univ. Tokyo)