Kenji Ishikawa

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 9:00 AM - 11:40 AM S301 (Oral)

Symposium (Oral)
| Symposium
| Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

[11a-S301-1~7] Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

10:25 AM - 10:55 AM

[11a-S301-5] Process design of atomic layer etching and the control of elementary reactions

〇Kenji Ishikawa¹, Thi-Thuy-Nga Nguyen¹, Takayoshi Tsutsumi¹, Shih-Nan Hsiao¹, Hiroki Kondo¹, Makoto Sekine¹, Masaru Hori¹ (1.Nagoya Univ.)