Tomoko Ito

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 9:00 AM - 11:40 AM S301 (Oral)

Symposium (Oral)
| Symposium
| Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

[11a-S301-1~7] Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

10:55 AM - 11:10 AM

[11a-S301-6] Surface reactions induced by low-energy ion irradiation in atomic layer processes

〇Tomoko Ito¹, Kazuhiro Karahashi¹, Satoshi Hamaguchi¹ (1.Osaka Univ.)