Sumiko Fujisaki

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 9:00 AM - 11:40 AM S301 (Oral)

Symposium (Oral)
| Symposium
| Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

[11a-S301-1~7] Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

11:10 AM - 11:40 AM

[11a-S301-7] Thermal-cyclic atomic layer etching of cobalt via oxide and organometallic complex

〇Sumiko Fujisaki¹, Yoshihide Yamaguchi¹, Hiroyuki Kobayashi¹, Kazunori Shinoda¹, Masaki Yamada¹, Hirotaka Hamamura¹, Kohei Kawamura², Masaru Izawa² (1.Hitachi, Ltd., R&D group, 2.Hitachi High-Tech)

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