Koji Fukugawa

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 9:00 AM - 11:00 AM S401 (Oral)

Oral presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.2 Education

[11a-S401-1~8] 1.2 Education

9:30 AM - 9:45 AM

[11a-S401-3] Educational content for semiconductor manufacturing equipment related to IoT & AI technology

〇Koji Fukugawa^1,2, Eiichi Hoshino¹ (1.SEAJ, 2.ULVAC, Inc.)