Masanaga Fukasawa

→ Search for Masanaga Fukasawa in Google Scholar

Speaker, Author, Co-Author

Sat. Sep 11, 2021 1:30 PM - 4:55 PM S301 (Oral)

Symposium (Oral)
| Symposium
| Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

[11p-S301-1~7] Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

4:15 PM - 4:45 PM

[11p-S301-6] Status and prospects of atomic layer etching

〇Masanaga Fukasawa¹ (1.Sony Semiconductor Solutions)