Jun Sekimoto

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 1:00 PM - 5:45 PM S401 (Oral)

Oral presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.6 Ultrasonics

[11p-S401-1~18] 1.6 Ultrasonics

3:30 PM - 3:45 PM

△ [11p-S401-10] Fabrication of the polarity inverted SiAlN/AlN multilayered films and applications to higher mode film bulk acoustic wave resonators

〇(M1)Jun Sekimoto¹, Masashi Suzuki¹, Shoji Kakio¹ (1.Univ. Yamanashi)