Keita Sahara

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 9:30 AM - 12:00 PM N106 (Oral)

Oral presentation
| 22 Joint Session M "Phonon Engineering"
| 22.1 Joint Session M "Phonon Engineering"

[12a-N106-1~9] 22.1 Joint Session M "Phonon Engineering"

11:15 AM - 11:30 AM

△ [12a-N106-7] Evaluation of Chemical Bonding States in Ru/TaN/Si for Thermal Management of
Next Generation VLSI Interconnection

〇Keita Sahara¹, Ryo Yokogawa^1,2, Tappei Nishihara¹, Naomi Sawamoto^1,2, Tianzhuo Zhan^3,4, Takanobu Watanabe³, Atsusi Ogura^1,2 (1.Meiji Univ., 2.MREL, 3.Waseda Univ., 4.Toyo Univ.)