Fumito Hayasaka

→ Search for Fumito Hayasaka in Google Scholar

Speaker, Author, Co-Author

Sun. Sep 12, 2021 9:00 AM - 11:30 AM N203 (Oral)

Oral presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[12a-N203-1~10] 6.4 Thin films and New materials

9:15 AM - 9:30 AM

[12a-N203-2] Influence of sputtering gas species on resistivity of Al and Pt thin films

〇Fumito Hayasaka¹, Midori Kawamura¹, Takayuki Kiba¹, Yoshio Abe¹ (1.Kitami Inst. of Tech.)