Kazuhisa Suzuki

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 9:00 AM - 11:30 AM N203 (Oral)

Oral presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[12a-N203-1~10] 6.4 Thin films and New materials

9:30 AM - 9:45 AM

[12a-N203-3] Properties of Ti and TiN thin films sputtered in different gas species

〇Kazuhisa Suzuki¹, Midori Kawamura¹, Takayuki Kiba¹, Yoshio Abe¹ (1.Kitami Inst. of Tech.)