Kohei Miyaji

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 9:00 AM - 12:00 PM N301 (Oral)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[12a-N301-1~11] 6.1 Ferroelectric thin films

9:45 AM - 10:00 AM

[12a-N301-4] Effect of sputtering conditions on internal stress of Al_1-xSc_xN thin films

〇Kohei Miyaji¹, Takeshi Yoshimura¹, Hagiwara Takuto¹, Norifumi Fujimura¹ (1.Osaka Pref. Univ.)