TsungEn Lee

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 9:00 AM - 12:00 PM N304 (Oral)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[12a-N304-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

10:00 AM - 10:15 AM

▲ [12a-N304-5] Performance improvement of Si_0.8Ge_0.2/SOI p-FinFETs by ultrathin Y₂O₃ gate stacks with TMA treatment

〇(D)TsungEn Lee¹, Shao-Tse Huang², Chiung-Yi Yang², Kasidit Toprasertpong¹, Mitsuru Takenaka¹, Yao-Jen Lee², Shinichi Takagi¹ (1.Univ. of Tokyo, 2.TSRI)