WENHSIN CHANG

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 9:00 AM - 12:00 PM N304 (Oral)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[12a-N304-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

10:15 AM - 10:30 AM

[12a-N304-6] Fabrication of GeOI(111) structure with Epitaxial Lift Off (ELO) technique

〇WENHSIN CHANG¹, Hsien-Wen Wan², Yi-Ting Cheng², Yen-Hsun G. Lin², Toshifumi Irisawa¹, Hiroyuki Ishii¹, Jueinai Kwo³, Minghwei Hong², Tatsuro Maeda¹ (1.AIST, 2.NTU, 3.NTHU)

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