Kaname Imokawa

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 9:00 AM - 11:45 AM N305 (Oral)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[12a-N305-1~10] 13.7 Compound and power devices, process technology and characterization

9:00 AM - 9:15 AM

[12a-N305-1] SiC Surface Characterization by KrF Excimer Laser Doping
Study of Laser Doping Mechanism (part 1)

〇Kaname Imokawa¹, Ryoichi Nohdomi¹, Yasutsugu Usami¹ (1.Gigaphoton Inc.)

9:15 AM - 9:30 AM

[12a-N305-2] SiC Surface Characterization by KrF Excimer Laser Doping
Study of Laser Doping Mechanism (part 2)

〇Kaname Imokawa¹, Ryoichi Nohdomi¹, Yasutsugu Usami¹ (1.Gigaphoton Inc.)