Jiawen Yu

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 9:00 AM - 11:45 AM N305 (Oral)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[12a-N305-1~10] 13.7 Compound and power devices, process technology and characterization

9:30 AM - 9:45 AM

▲ [12a-N305-3] Automatic Temperature Measurement of SiC Wafer During Millisecond Thermal Processing Based on Optical-Interference Contactless Thermometry (OICT)

〇Jiawen Yu¹, Keiya Fujimoto¹, Kotaro Matsuguchi¹, Takuma Sato¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)