Tetsuyuki Matsumoto

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 9:15 AM - 11:30 AM S401 (Oral)

Oral presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.3 Novel technologies and interdisciplinary engineering

[12a-S401-1~8] 1.3 Novel technologies and interdisciplinary engineering

9:45 AM - 10:00 AM

[12a-S401-3] Changes of Single- and Poly-crystalline Silicon Parts by Etching in Reactive Ion Etching Equipment

〇Tetsuyuki Matsumoto^1,2, Tetsuya Homma¹ (1.Shibaura Institute of Technology, 2.Kioxia)

10:00 AM - 10:15 AM

[12a-S401-4] Study on Verticalization of Gas Release Hole for Upper Electrode
in Reactive Ion Etching Equipment

〇Tetsuyuki Matsumoto^1,2, Tetsuya Homma¹ (1.Shibaura Institute of Technology, 2.Kioxia)