Yuki Fujiwara

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 1:30 PM - 5:30 PM N301 (Oral)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[12p-N301-1~15] 6.1 Ferroelectric thin films

4:15 PM - 4:30 PM

△ [12p-N301-11] Investigation on Mist CVD-Derived Hf_xZr_1-xO₂ Ferroelectric Thin Films Post-Deposition Annealed by Rapid Thermal Annealing

〇(M2)Yuki Fujiwara¹, Hiroyuki Nishinaka¹, Masahiro Yoshimoto¹, Minoru Noda¹ (1.Kyoto Inst. Tech.)