Takumi Ohtsuki

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 1:30 PM - 5:15 PM N305 (Oral)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[12p-N305-1~14] 13.7 Compound and power devices, process technology and characterization

4:30 PM - 4:45 PM

[12p-N305-12] Fabrication of Lateral Ga₂O₃ MOSFETs on Nitrogen-Implanted Substrates

〇Takumi Ohtsuki¹, Masataka Higashiwaki¹ (1.NICT)