Fumito Imura

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 1:00 PM - 4:15 PM N323 (Oral)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[12p-N323-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:45 PM - 2:00 PM

[12p-N323-4] Thickness Distribution of Cu Film in Half-Inch Area by Minimal Cu Electroplating Tool

〇Fumito Imura¹, Kayo Kamasaki², Shinji Iseki², Michihiro Inoue¹, Sommawan Khumpuang^1,3, Shiro Hara^1,3 (1.AIST, 2.Kumamotobosei, 3.MINIMAL)

3:00 PM - 3:15 PM

[12p-N323-8] Development of Minimal Tool for Device Electrical Measurement

〇Fumito Imura¹, Yoshihide Murashima², Masahiro Matsuda², Tadaaki Tsuchiya², Kaoru Zenyouji³, Takashi Ohe³, Kouji Kosaka³, Shun-ichirou Shimbori⁴, Toru Hayakawa¹, Sommawan Khumpuang^1,5, Shiro Hara^1,5 (1.AIST, 2.Logic Research, 3.TCK, 4.Sanyu, 5.MINIMAL)

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