Eldar Sido

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 10:30 AM - 11:45 AM N106 (Oral)

Oral presentation
| 22 Joint Session M "Phonon Engineering"
| 22.1 Joint Session M "Phonon Engineering"

[13a-N106-1~5] 22.1 Joint Session M "Phonon Engineering"

11:30 AM - 11:45 AM

▲ [13a-N106-5] Design and Fabrication of Silicon-Based Micro Thermoelectric Coolers

〇(M2)Eldar Sido¹, Ryoto Yanagisawa¹, Souta Koike¹, Patrick Ruther², Oliver Paul², Masashi Kurosawa³, Sebastian Volz^1,4, Masahiro Nomura¹ (1.IIS Univ. of Tokyo, 2.IMTEK Freiburg Univ., 3.Nagoya Univ., 4.LIMMS, CNRS-IIS)

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