EUNKI HONG

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 9:30 AM - 11:15 AM N203 (Oral)

Oral presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[13a-N203-1~7] 6.4 Thin films and New materials

10:45 AM - 11:00 AM

▼ [13a-N203-6] A study of Ar/N₂-sputtering gas pressure on electrical characteristics of LaB_xN_y insulator formed by RF sputtering

〇(D)EUNKI HONG¹, Shun-ichiro Ohmi¹ (1.Tokyo Inst. of Technology)