Shonosuke Kimura

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 9:00 AM - 11:45 AM N305 (Oral)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[13a-N305-1~10] 13.7 Compound and power devices, process technology and characterization

10:15 AM - 10:30 AM

△ [13a-N305-6] Performance Improvements of P-channel GaN HFETs by ALE using Nitrogen Plasma

〇(M1)Shonosuke Kimura¹, Katsuyuki Miura¹, Takuya Hoshii¹, Kuniyuki Kakushima¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui¹ (1.Tokyo Inst.)