Kazunori Koga

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 9:00 AM - 12:00 PM N323 (Oral)

Oral presentation
| 8 Plasma Electronics
| 8.3 Plasma nanotechnology

[13a-N323-1~10] 8.3 Plasma nanotechnology

9:00 AM - 9:15 AM

[13a-N323-1] Effects of Gas Pressure on Size of Carbon Nanoparticles Synthesized by Ar+CH₄ Capacitively Coupled Plasma CVD

〇Kazunori Koga^1,2, Sung Hwa Hwang¹, Shinjiro Ono¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Naho Itagaki¹, Susumu Takabayashi³, Jun Seok Oh⁴, Tatsuyuki Nakatani⁵, Masaharu Shiratani¹ (1.Kyushu Univ., 2.NINS, 3.National Inst. Tech., Ariake College, 4.Osaka City Univ., 5.Okayama Univ. Sci.)