Akito Taguchi

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 9:00 AM - 11:30 AM S201 (Oral)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[13a-S201-1~9] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

10:45 AM - 11:00 AM

[13a-S201-7] Growth of α-In₂O₃ by Mist CVD Using Indium Oxide Powder as Source Precursor

〇Akito Taguchi¹, Kentaro Kaneko², Shizuo Fujita², Takeyoshi Onuma¹, Tohru Honda¹, Tomohiro Yamaguchi¹ (1.Kogakuin Univ., 2.Kyoto Univ.)