Kojun Yokoyama

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 9:00 AM - 11:30 AM S201 (Oral)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[13a-S201-1~9] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

11:00 AM - 11:15 AM

[13a-S201-8] Effect of bias supply during synthesis of AlOx and TiO_x thin films by a mist chemical vapor deposition

〇(M1)Kojun Yokoyama¹, Arifuzzaman Rajib¹, Abdul Kuddus¹, Tomohiro Shida¹, Keiji Ueno¹, Hajime Shirai¹ (1.Saitama Univ.)