Tomonori Oku

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 1:00 PM - 6:00 PM N101 (Oral)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[13p-N101-1~18] 15.4 III-V-group nitride crystals

1:30 PM - 1:45 PM

△ [13p-N101-3] Effect of void shape on internal stress of the nitride layer grown on Si substrates

〇Tomonori Oku¹, Takeshi Momose¹, Yukihiro Shimogaki¹, Momoko Deura¹ (1.The univ. of Tokyo)