Ryoko Yamamoto

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 1:30 PM - 5:15 PM N105 (Oral)

Oral presentation
| 3 Optics and Photonics
| 3.9 Terahertz technologies

[13p-N105-1~14] 3.9 Terahertz technologies

4:30 PM - 4:45 PM

[13p-N105-12] Improvement of the thermal sensitivity of MEMS thermal sensors with mesh nanostructures

〇Ryoko Yamamoto¹, Ryota Seki¹, Isao Morohashi², Naomi Nagai³, Kazuhiko Hirakawa^3,4, Akira Kojima¹, Nobuyoshi Koshida¹, Ya Zhang¹ (1.TUAT, 2.NICT, 3.IIS TU, 4.INQIE TU)

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