Masahiro Kaneko

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 1:00 PM - 4:45 PM S201 (Oral)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[13p-S201-1~14] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

4:30 PM - 4:45 PM

[13p-S201-14] Epitaxial growth of β-(AlxGa1-x)2O3 thin films on (010)β-Ga2O3 substrates by mist Chemical Vapor Deposition

〇Masahiro Kaneko¹, Ryuto Horie¹, Yuki Kajita¹, Hiroyuki Nishinaka¹, Masahiro Yoshimoto¹ (1.Kyoto Inst. of Tech.)