Yu Owada

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 1:00 PM - 5:15 PM S301 (Oral)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[13p-S301-1~15] 6.2 Carbon-based thin films

4:30 PM - 4:45 PM

[13p-S301-13] Martens Hardness of DLC Deposited by GCIB Assisted Vapor Deposition under Different Film Formation Conditions

〇Yu Owada¹, Akio Nishiyama², Ryota Yoshikawa², Junji Taguchi², Keishi Komatsu¹, Hidetoshi Saitoh¹ (1.Nagaoka Univ. Tech., 2.Nomura Plating Co., Ltd.)