Tsubasa Takai

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 1:00 PM - 5:15 PM S301 (Oral)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[13p-S301-1~15] 6.2 Carbon-based thin films

1:15 PM - 1:30 PM

[13p-S301-2] Fabrication and structural analysis of a-SiCN_x:H films from the decomposition of organosilicon compound induced by the microwave plasma of N₂

〇Tsubasa Takai¹, Haruhiko Ito¹, Tsuneo Suzuki¹ (1.Nagaoka Univ. of Tech)