Yuya Sasaki

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 1:00 PM - 5:15 PM S301 (Oral)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[13p-S301-1~15] 6.2 Carbon-based thin films

1:30 PM - 1:45 PM

[13p-S301-3] Effects of Hydrogen and Argon Dilution on the Properties of Silicon and Nitrogen Doped Diamond-Like Carbon Films by Plasma-Enhanced Chemical Vapor Deposition

〇Yuya Sasaki¹, Hiroya Osanai¹, Yusuke Ohtani¹, Yuta Murono¹, Masayoshi Sato¹, Yasuyuki Kobayashi¹, Yoshiharu Enta¹, Yushi Suzuki¹, Hideki Nakazawa¹ (1.Hirosaki Univ.)

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