Hikaru Ohhra

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 1:00 PM - 5:15 PM S301 (Oral)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[13p-S301-1~15] 6.2 Carbon-based thin films

2:15 PM - 2:30 PM

△ [13p-S301-6] High-Rate Deposition of DLC Films Using Plasma Jet CVD Method by Applying Substrate-Pulse-Bias Voltage

〇Hikaru Ohhra¹, Takahiro Bando¹, Hirofumi Takikawa¹, Toru Harigai¹, Hidenobu Gonda², Shinsuke Kunitsugu³ (1.Toyohashi Univ. Technol., 2.OSG Coating Service Co., Ltd., 3.Ind. Technol. Cent. Okayama Pref.)

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