Takumi Tominaga

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Speaker, Author, Co-Author

Tue. Sep 21, 2021 9:00 AM - 10:40 AM P06 (Poster)

Poster presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.6 Ultrasonics

[21a-P06-1~4] 1.6 Ultrasonics

9:00 AM - 10:40 AM

[21a-P06-4] Fabrication of c-axis tilted ScAlN film/Si substrate layered structure for SAW devices

〇Takumi Tominaga¹, Shinji Takayanagi¹, Takahiko Yanagitani² (1.Doshisha Univ., 2.Waseda Univ.)