Sri Ayu Anggraini

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Speaker, Author, Co-Author

Wed. Sep 22, 2021 9:00 AM - 10:40 AM P01 (Poster)

Poster presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[22a-P01-1~4] 6.1 Ferroelectric thin films

9:00 AM - 10:40 AM

▲ [22a-P01-4] Polarity inversion of scandium aluminum nitride (ScAlN) piezoelectric thin films by using Ge addition

〇Sri Ayu Anggraini¹, Masato Uehara¹, Kenji Hirata¹, Hiroshi Yamada¹, Morito Akiyama¹ (1.AIST)