Kazuto Sodeyama

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Speaker, Author, Co-Author

Wed. Sep 22, 2021 9:00 AM - 10:40 AM P04 (Poster)

Poster presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[22a-P04-1~18] 6.4 Thin films and New materials

9:00 AM - 10:40 AM

[22a-P04-4] Effect of nitrogen plasma fusion on excimer laser irradiation process

〇Kazuto Sodeyama¹, Mamami Nishikawa¹, Takayuki Ishibashi¹, Masami Kawahara², Tomohiko Nakajima³, Tetsuo Tsuchiya³ (1.Nagaoka Univ. of Tech., 2.Kojundo Chem. Lab., 3.AIST)

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