Makoto Ozawa

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Speaker, Author, Co-Author

Wed. Sep 22, 2021 11:00 AM - 12:40 PM P07 (Poster)

Poster presentation
| 7 Beam Technology and Nanofabrication
| 7 Beam Technology and Nanofabrication(Poster)

[22a-P07-1~6] 7 Beam Technology and Nanofabrication(Poster)

11:00 AM - 12:40 PM

[22a-P07-2] Fabrication of Hf and HfN Spindt-type emitters using triode HPPMS

〇Makoto Ozawa¹, Suruz Mian Md.¹, Takeo Nakano¹, Hiromasa Murata², Katsuhisa Murakami², Masayoshi Nagao² (1.Seikei Univ., 2.AIST)