Shun Sasaki

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Speaker, Author, Co-Author

Wed. Sep 22, 2021 11:00 AM - 12:40 PM P08 (Poster)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics(Poster)

[22a-P08-1~11] 8 Plasma Electronics(Poster)

11:00 AM - 12:40 PM

[22a-P08-11] Numerical analysis of the dependence of various external parameters on the characteristics of low-pressure C₂H₂ plasma for DLC deposition

〇Shun Sasaki¹, Koichi Ishii¹, Akinori Oda¹ (1.Chiba Inst.)