Yuki Nakaizumi

→ Search for Yuki Nakaizumi in Google Scholar

Speaker, Author, Co-Author

Wed. Sep 22, 2021 11:00 AM - 12:40 PM P08 (Poster)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics(Poster)

[22a-P08-1~11] 8 Plasma Electronics(Poster)

11:00 AM - 12:40 PM

[22a-P08-8] Formation of Sponge-like SiO:CH by CCP-CVD using Organosilicon Reactant

〇Yuki Nakaizumi¹, Yasushi Inoue¹, Osamu Takai² (1.Chiba Inst. Technol., 2.Kanto Gakuin Univ.)