Kosuke Takenaka

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Speaker, Author, Co-Author

Wed. Sep 22, 2021 1:00 PM - 2:40 PM P01 (Poster)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics(Poster)

[22p-P01-1~12] 8 Plasma Electronics(Poster)

1:00 PM - 2:40 PM

[22p-P01-12] Low-temperature Formation of High-Mobility IGZO Thin Film Transistors using Reactive Plasma Processes (IV)

〇Kosuke Takenaka¹, Yuji Hayashi¹, Hibiki Komatsu¹, Susumu Toko¹, Giichiro Uchida², Akinori Ebe³, Yuichi Setsuhara¹ (1.Osaka Univ., 2.Meijo Univ., 3.EMD Corp.)

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