Kentaro Saito

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Speaker, Author, Co-Author

Wed. Sep 22, 2021 1:00 PM - 2:40 PM P01 (Poster)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics(Poster)

[22p-P01-1~12] 8 Plasma Electronics(Poster)

1:00 PM - 2:40 PM

[22p-P01-3] Modeling of low-temperature aluminum nitride atomic layer deposition

〇(D)Kentaro Saito^1,2, Kazuki Yoshida^1,2, Masanori Miura³, Kensaku Kanomata³, Bashir Ahmmad¹, Shigeru Kubota¹, Fumihiko Hirose¹ (1.Yamagata Univ., 2.JSPS Research Fellow, 3.ROEL Yamagata Univ.)

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