Tomoki Yamanaka

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Speaker, Author, Co-Author

Wed. Sep 22, 2021 1:00 PM - 2:40 PM P01 (Poster)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics(Poster)

[22p-P01-1~12] 8 Plasma Electronics(Poster)

1:00 PM - 2:40 PM

[22p-P01-5] Dependence of β-W thin film structure on substrate temperature and W-target distance

〇(M2)Tomoki Yamanaka¹, HeunTae Lee¹, Kenzo Ibano¹, Yoshio Ueda¹ (1.Osaka Univ.)