Takayuki Ohta

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Speaker, Author, Co-Author

Wed. Sep 22, 2021 1:00 PM - 2:40 PM P01 (Poster)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics(Poster)

[22p-P01-1~12] 8 Plasma Electronics(Poster)

1:00 PM - 2:40 PM

[22p-P01-9] Plasma diagnostics of carbon-HiPIMS for depositing DLC film (3)

〇Takayuki Ohta¹, Jo Matsushima¹, Akinori Oda², Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)