Wataru Kubota

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Speaker, Author, Co-Author

Thu. Sep 23, 2021 9:00 AM - 10:40 AM P03 (Poster)

Poster presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[23a-P03-1~4] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

9:00 AM - 10:40 AM

[23a-P03-4] Chemical etching of silicon assisted by patterned graphene oxide in the vapor phase

〇Wataru Kubota¹, Toru Utsunomiya¹, Takashi Ichii¹, Hiroyuki Sugimura¹ (1.Kyoto Univ.)