Tomoki Oku

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Speaker, Author, Co-Author

Thu. Sep 23, 2021 9:00 AM - 10:40 AM P05 (Poster)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[23a-P05-1~2] 13.3 Insulator technology

9:00 AM - 10:40 AM

[23a-P05-1] Dependence of penetration barrier of alkaline earth metal ions into SiN_x and SiO_x films on ion radius

〇Tomoki Oku¹, Masahiro Totsuka¹, Hajime Sasaki¹ (1.Mitsubishi Electric)