Masayuki Tsutsumi

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Speaker, Author, Co-Author

Thu. Sep 23, 2021 9:00 AM - 10:40 AM P06 (Poster)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[23a-P06-1~5] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:00 AM - 10:40 AM

[23a-P06-1] Study on PD Structures of SOI-Si/4H-SiC Hybrid Image Sensors

〇(M1)Masayuki Tsutsumi¹, Tatsuya Meguro¹, Kazuya Kawamura¹, Takeshi Ohshima², Yasunori Tanaka³, Shin-Ichiro Kuroki¹ (1.RNBS, Hiroshima Univ., 2.QST, 3.AIST)

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