Nguyen ThiKhanh Hoa

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Speaker, Author, Co-Author

Thu. Sep 23, 2021 9:00 AM - 10:40 AM P06 (Poster)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[23a-P06-1~5] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:00 AM - 10:40 AM

▲ [23a-P06-3] Application of Millisecond Solid Phase Crystallization of Silicon Films Induced by Micro-Thermal-Plasma-Jet to Bottom-Gate Thin-Film Transistors

〇(DC)Nguyen ThiKhanh Hoa¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)