Yoshiyuki Watanabe

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Speaker, Author, Co-Author

Thu. Sep 23, 2021 9:00 AM - 10:40 AM P06 (Poster)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[23a-P06-1~5] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:00 AM - 10:40 AM

[23a-P06-5] MEMS Rogowski Coil Current Sensor with Spiral Return Coil

〇Yoshiyuki Watanabe¹, Mutsuto Kato¹, Toru Yahagi¹, Hiroki Murayama¹, Naoya Yamada¹, Kenichi Yoshida², Kenichi Maehara², Yusuke Fukuda², Kazuyuki Sashida², Katsuya Ikeda², Kosuke Ikeda², Toshiyuki Takemori² (1.Yamagata RIT, 2.Shindengen)

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