Keitaro Toda

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Speaker, Author, Co-Author

Thu. Sep 23, 2021 11:00 AM - 12:40 PM P10 (Poster)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[23a-P10-1~14] 13.7 Compound and power devices, process technology and characterization

11:00 AM - 12:40 PM

[23a-P10-13] Electrical properties of normally-off type AlGaN/GaN MIS-HEMTs with SiO₂/Al₂O₃ double insulators fabricated by ALD

〇Keitaro Toda¹, Toshiharu Kubo¹, Takashi Egawa¹ (1.NITech)