Tomoharu Akaishi

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Speaker, Author, Co-Author

Thu. Sep 23, 2021 3:00 PM - 4:40 PM P12 (Poster)

Poster presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)

[23p-P12-1~11] 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)

3:00 PM - 4:40 PM

[23p-P12-1] Fabrication of α-Ir₂O₃ thin film using IrBr₃ precursor by mist CVD

〇Tomoharu Akaishi¹, Takashi Shinohe², Kentaro Kaneko¹ (1.Kyoto Univ., 2.FLOSFIA INC.)